PMS ASII-Point of Use Ion Mobility Spectrometer (IMS)
  • PMS ASII-Point of Use Ion Mobility Spectrometer (IMS)
  • Model:
  • Description:

​Our main products of U.S. Particle Measuring Systems (PMS) are airborne molecular contamination monitoring and analysis instruments for clean room. The AirSentry II AMC gas analyzer using principle of IMS (Ion Mobility Spectrometry) can measure concentrations as low as ppt levels. It provides Ammonia, Amines, TA (Total Acids), Chlorides (HCl + Cl2) and other gas analyzers and related calibration device.


Application of PMS AS-II AMC products.

Installation of monitoring methods


■ In clean room

■ MAU in & out

■ Quality of recycle air

■ 193nm Photolithography procedure


■ Lithography and Etching

■ Reticle SMIF Pod and FOUP

■ Manufacturing equipment machines

■ Environment or leak investigation


■ Point of use

■ Multi-point sampling system

■ Mobile Cart





■ Contaminants detected:NH3, Amines, TA, Chlorides

■ Single point measurements(Continuous AMC monitoring of a critical location)

■ With multi-point sampling system(for clean room used)

■ Minimum detection limit up 70 ppt or lower

■ Measurement accuracy,Fast response,Without interference from other species

■ Compact size allows placement in any location

■ Infrequent preventive maintenance

■ Single external calibration system ensures analyzer-to-analyzer matching

■ Robust and reliable data acquisition,control, and analysis