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WelTof Cleanroom Multiport AMC Gas Monitoring System

   

WelTof series are Weltall integrate Tofwerk's instrument and other components to online multiport manifold monitoring systems. It is one of the best solutions to improve semiconductor fabrication and wafer yields. WelTof means collaboration between Weltall and Tofwerk.

 

Features:
 
■ Using PTR-TOF technology and patented design
■ Ultra-fast simultaneous detection of multiple key AMC classes with ppt level
■ Customized cleanroom multiport 16CH-192CH system design and integration
■ Customized database for common AMCs
■ Manifold connectivity without sample preparation
■ 2D/3D software is available to trace unknown species
■  Stand-alone / Mobile / Multiport systems are available

 

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