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WelTof Cleanroom Multiport AMC Gas Monitoring System

   

WelTof series are Weltall integrate Tofwerk's instrument and other components to online multiport manifold monitoring systems. It is one of the best solution to improve semiconductor fabrication and wafer yields. WelTof means collaboration between Weltall and Tofwerk.

 

Features:
 
Using PTR-TOF technology and patented design
Ultra-fast simultaneous detection of multiple key AMC classes with ppt level
Customized cleanroom multiport 16CH-192CH system design and integration
Customized database for common AMCs
Manifold connectivity without sample preparation
2D/3D software is available to trace unknown species
  Stand-alone / Mobile / Multiport systems are available

 

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